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Characterization of a 0.25NA full-field EUV exposure toolKRITSUN, Oleg; LA FONTAINE, Bruno; YUDONG HAO et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7271, issn 0277-786X, isbn 978-0-8194-7524-4 0-8194-7524-6, 727121.1-727121.11, 2Conference Paper

Scanner matching optimizationSUPERS, Michiel; KLINGBEIL, Patrick; TSCHISCHGALE, Joerg et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7272, issn 0277-786X, isbn 978-0-8194-7525-1 0-8194-7525-4, 72723B.1-72723B.7, 2Conference Paper

Fabrication of microsphere plate electron multiplier deviceWANG, Xin; LI, Ye; WANG, Guozheng et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, pp 66210D.1-66210D.7, issn 0277-786X, isbn 978-0-8194-6763-8Conference Paper

Actinic Review of EUV MasksFELDMANN, Heiko; RUOFF, Johannes; HARNISCH, Wolfgang et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7636, issn 0277-786X, isbn 978-0-8194-8050-7 0-8194-8050-9, 76361C.1-76361C.11, 2Conference Paper

Measuring resist-induced contrast loss using EUV interference lithographyLANGNER, Andreas; SOLAK, Harun H; GRONHEID, Roel et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7636, issn 0277-786X, isbn 978-0-8194-8050-7 0-8194-8050-9, 76362X.1-76362X.11, 2Conference Paper

A study of the NEA photocathode activation technique on [GaAs(Zn): Cs]: O -Cs modelLIU WENLI; WANG HUI; CHANG BENKANG et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 63523A.1-63523A.7, issn 0277-786X, isbn 0-8194-6447-3, 2VolConference Paper

Inspection 13.2 nm table-top full-field microscopeBRIZUELA, F; WANG, Y; MARCONI, M. C et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7271, issn 0277-786X, isbn 978-0-8194-7524-4 0-8194-7524-6, 72713F.1-72713F.7, 2Conference Paper

A Novel 3D Reconstruction Approach by Dynamic (de)focused LightLERTRUSDACHAKUL, Intuon; FOUGEROLLE, Yohan D; LALIGANT, Olivier et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7538, issn 0277-786X, isbn 978-0-8194-7931-0 0-8194-7931-4, 75380L.1-75380L.10Conference Paper

EUV into production with ASML's NXE platformWAGNER, Christian; HARNED, Noreen; THUERING, Bernd et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7636, issn 0277-786X, isbn 978-0-8194-8050-7 0-8194-8050-9, 76361H.1-76361H.12, 2Conference Paper

Segmentation of thermographic images of hands using a genetic algorithmGHOSH, Payel; MITCHELL, Melanie; GOLD, Judith et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7538, issn 0277-786X, isbn 978-0-8194-7931-0 0-8194-7931-4, 75380D.1-75380D.8Conference Paper

Important challenges for line-width-roughness reductionYAEAGSHI, Hidetami; KUSHIBIKI, M; Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7273, issn 0277-786X, isbn 978-0-8194-7526-8 0-8194-7526-2, 72732H.1-72732H.6, 2Conference Paper

Sensors, cameras, and systems for scientific / industrial applications VII (17-19 January 2006, San Jose, California USA)Blouke, Morley M.Proceedings of SPIE, the International Society for Optical Engineering. 2006, issn 0277-786X, isbn 0-8194-6108-3, 1Vol, pagination multiple, isbn 0-8194-6108-3Conference Proceedings

Improve Scanner Matching Using Automated Real-Time Feedback Control via Scanner Match Maker (SMM)CHIU, Shian-Huan Cooper; YU, Sheng-Hsiung; YUYU CHEN et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7272, issn 0277-786X, isbn 978-0-8194-7525-1 0-8194-7525-4, 72723E.1-727233E.6, 2Conference Paper

The capability comparison of high-performance GaAs photocathodesWANG HUI; CHANG BENKANG; ZOU JIJUN et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 635238.1-635238.7, issn 0277-786X, isbn 0-8194-6447-3, 2VolConference Paper

Defect reduction in non-topcoat resist by selective segregation removal stepHAGIWARA, Takuya; TERAI, Mamoru; MAN, Naoki et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7273, issn 0277-786X, isbn 978-0-8194-7526-8 0-8194-7526-2, 727324.1-727324.11, 2Conference Paper

COMPRENDRE : les détecteurs à gain interne = UNDERSTAND : Internal gain detectorsBERNHARDT, Sylvie; HAÏDAR, Riad; DERELLE, Sophie et al.Photoniques (Orsay). 2008, Num 35, pp 30-35, issn 1629-4475, 6 p.Article

Improvement in the light sensitivity of the ultrahigh-speed, high sensitivity CCD with a microlens arrayHAYASHIDA, T; YONAI, J; YAMAGUCHI, T et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, pp 68900M.1-68900M.9, issn 0277-786X, isbn 978-0-8194-7065-2, 1VolConference Paper

High-performance MBE GaAs photocathodeYANG ZHI; CHANG BENKANG; ZOU JIJUN et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 635237.1-635237.6, issn 0277-786X, isbn 0-8194-6447-3, 2VolConference Paper

Development of large area fast microchannel plate photo-detectorsBYRUM, Karen.Proceedings of SPIE, the International Society for Optical Engineering. 2011, Vol 8033, issn 0277-786X, isbn 978-0-8194-8607-3, 80330U.1-80330U.12Conference Paper

Calibration and control of a robotic arm using a range imaging cameraKELLY, Cameron B. D; DORRINGTON, Adrian A; CREE, Michael J et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7538, issn 0277-786X, isbn 978-0-8194-7931-0 0-8194-7931-4, 75380J.1-75380J.8Conference Paper

Fabrication of 35-nm via-hole patterns for interconnect test chips with EUV lithographyTANAKA, Yuusuke; AOYAMA, Hajime; NAKAMURA, Naofumi et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7636, issn 0277-786X, isbn 978-0-8194-8050-7 0-8194-8050-9, 76362D.1-76362D.12, 2Conference Paper

Tin DPP Source Collector Module (SoCoMo): Status of Beta products and HVM developmentsYOSHIOKA, Masaki; TERAMOTO, Yusuke; ZINK, Peter et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7636, issn 0277-786X, isbn 978-0-8194-8050-7 0-8194-8050-9, 763610.1-763610.12, 2Conference Paper

EUV patterning Characterization Using a 3D Mask Simulation and Field EUV ScannerPARK, Jun-Taek; HYUN, Yoon-Suk; NAM, Byoung-Ho et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7271, issn 0277-786X, isbn 978-0-8194-7524-4 0-8194-7524-6, 72711G.1-72711G.10, 2Conference Paper

Immersion scanner proximity matching using angle resolving scatterometry metrologyKOU, Ren-Jay; JUNGBLUT, Reiner; HAUSCHILD, Jan et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7272, issn 0277-786X, isbn 978-0-8194-7525-1 0-8194-7525-4, 727240.1-727240.8, 2Conference Paper